Product Feature
·PET composite material
·Various patterns, sizes and shapes can be customized
·Stable anti-static
·Durable
·Strong enough
Product Specification
表面电阻值范围(Ω/Sq) General resistance | 厚度 (μm) Thickness | 宽度(mm) Width | 长度(m) Length | 使用温度 (℃) Using Temperature |
≤ 1K | 40~50 | 5~520 | 定制Customized | -100~260 |
Advantages of HAOUGER Durable Small Semiconductor Cmp polishing pads.
The CMP pad is made of PET composite carbon film synthesized by a special process. The surface of the finished product is smooth and flat, scratch-resistant, acid and alkali resistant. The permanent surface resistance value is less than 1K Ω, which is uniform and stable. It can quickly disperse accumulated powder during polishing. Compared with polishing pads made by traditional coating method, this product has a longer life span (2.5-5 times more durable).
Product Feature
·PET composite material
·Various patterns, sizes and shapes can be customized
·Stable anti-static
·Durable
·Strong enough
Product Specification
表面电阻值范围(Ω/Sq) General resistance | 厚度 (μm) Thickness | 宽度(mm) Width | 长度(m) Length | 使用温度 (℃) Using Temperature |
≤ 1K | 40~50 | 5~520 | 定制Customized | -100~260 |
Advantages of HAOUGER Durable Small Semiconductor Cmp polishing pads.
The CMP pad is made of PET composite carbon film synthesized by a special process. The surface of the finished product is smooth and flat, scratch-resistant, acid and alkali resistant. The permanent surface resistance value is less than 1K Ω, which is uniform and stable. It can quickly disperse accumulated powder during polishing. Compared with polishing pads made by traditional coating method, this product has a longer life span (2.5-5 times more durable).