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Durable Small Semiconductor Cmp Polishing Pads

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Product Feature

·PET composite material

·Various patterns, sizes and shapes can be customized

·Stable anti-static

·Durable

·Strong enough

Product Specification

表面电阻值范围(Ω/Sq)

General  resistance

厚度 (μm)

Thickness

宽度(mm)

Width

长度(m)

Length

使用温度

(℃)

Using Temperature

≤ 1K

40~50

5~520

定制Customized

-100~260

应用图

Advantages of HAOUGER Durable Small Semiconductor Cmp polishing pads.

The CMP pad is made of PET composite carbon film synthesized by a special process. The surface of the finished product is smooth and flat, scratch-resistant, acid and alkali resistant. The permanent surface resistance value is less than 1K Ω, which is uniform and stable. It can quickly disperse accumulated powder during polishing. Compared with polishing pads made by traditional coating method, this product has a longer life span (2.5-5 times more durable).


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Shanghai HAOUGER Electronic Technology Co., Ltd.was established in 2005. Our factory has more than 20 years of experience in the production of conductive carbon films.

Our Contacts

  3F, Building No.3, No.4077, Cao’an 
     Hwy, Shanghai,201804,China
  +86-21-5996-5558
     +86-21-5168-6844
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