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CMP Polishing Pad

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Quantity:


 ·CMP Polishing Pad  


product name:

CMP Polishing Pad

product model:JH5900


Product Description:

The CMP pad is made of PET composite carbon film synthesized by a special process. The surface of the finished product is smooth and flat, scratch-resistant, acid and alkali resistant. The permanent surface resistance value is less than 1K Ω, which is uniform and stable. It can quickly disperse accumulated powder during polishing. Compared with polishing pads made by traditional coating method, this product has a longer life span (2.5-5 times more durable).


Application:

Used wafer polishing process.


The main technical parameters:

General resistance(Ω/Sq)


Thickness(μm)


Width(mm)


Length(m)


Using Temperature(℃)


≤ 1K

40~50

5~520

Customized

-100~260



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Shanghai HAOUGER Electronic Technology Co., Ltd.was established in 2005. Our factory has more than 20 years of experience in the production of conductive carbon films.

Our Contacts

  3F, Building No.3, No.4077, Cao’an 
     Hwy, Shanghai,201804,China
  +86-21-5996-5558
     +86-21-5168-6844
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